Classical Physics

    

Development of High-Sensitivity Pressure Sensor with on-Chip Differential Transistor Amplifier

Authors: Mikhail Basov

A mathematical model of a high-sensitivity pressure sensor with a novel electrical circuit utilizing piezosensitive transistor differential amplifier with negative feedback loop (PDA-NFL) is presented. Circuits utilizing differential transistor amplifiers based on vertical n-p-n and lateral p-n-p transistors are analyzed and optimized for sensitivity to pressure and stability of output signal in operating temperature range. Parameters of fabrication process necessary for modeling of I-V characteristics of transistors are discussed. The results of the model are sufficiently close to the experimental data.

Comments: 10 Pages. Journal of Micromechanics and Microengineering, https://doi.org/10.1088/1361-6439/ab82f1

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Submission history

[v1] 2021-07-06 19:37:24

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