Classical Physics

    

Investigation of High Sensitivity Piezoresistive Pressure Sensors for 0.5…+0.5 Kpa

Authors: Mikhail Basov, D. Prigodskiy

The investigation of the pressure sensor chip’s design developed for operation in ultralow differential pressure ranges has been conducted. The optimum geometry of a membrane has been defined using available technological resources. The pressure sensor chip with an area of 6.15х6.15 mm has an average sensitivity S of 34.5 mV/кPa/V at nonlinearity 2KNL = 0.81 %FS and thermal hysteresis up to 0.6 %FS was created. Owing to the chip connection with stop elements, the burst pressure reaches 450 кPa.

Comments: 7 Pages. IEEE Sensors, https://doi.org/10.1109/JSEN.2020.2980326

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[v1] 2021-07-06 19:24:21

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