Classical Physics

    

Surface Roughness Measurement and Surface Smoothing Via Phase-Contrast Imaging and Either Grayscale Lithography or Laser Ablation

Authors: Kenneth C. Johnson

Surface roughness can be measured by using a phase-contrast, point-imaging system to measure the surface height at a focal point relative to an average surface height across an area surrounding the point. A scanning process (e.g., raster scanning or turning) is used to construct a surface height profile over an extended area. At the same time, a surface smoothing process can be applied by a grayscale lithographic process in which a photoresist-coated surface is exposed to a laser-writing beam, which is intensity-modulated in response to the surface height measurement. Alternatively, surface smoothing can be effected by direct laser ablation of the surface.

Comments: 13 Pages.

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Submission history

[v1] 2021-05-27 15:32:20
[v2] 2021-08-01 03:15:30

Unique-IP document downloads: 314 times

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