Authors: Lev Ryzhikov
Currently, many optical tests required the simultaneous measurement values of various technological or metrological parameters. These requirements primarily relate to production and metrological measurements. Examples include optical testing of deformations of parts (e.g., plates) under variable load, shifts of various components of high-precision equipment, and, of course, various metrological measurements of high-precision equipment, such as lithographic machines and different types of measuring and control devices. Simultaneous measurement of one parameter in different parts of the product allows to determine the error (e.g., deformation or alignment error) in object position. Observation and analysis of the position of specific points on the object allows one to judge about deviations both in position and deformation of the measured surface. The proposed multichannel optical prism allows to simultaneously observe several points located on the different parts of the object, as well as monitor their movement in working conditions. The prism must be built into the optical circuit of the measuring device. Some examples of such kind of devices will be discussed below.
Comments: 7 Pages. The multichannel optical prism was developed and shown how to build-in such kind of prism in real optical device
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[v1] 2021-05-09 19:29:12
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